PRODUCTS

Product Summary

Chemical Formula

BF3

Chemical Name

Boron Trifluoride

UN Number

1008

CAS Number

7637 - 07 - 2

Label

Toxic Gas

Hazard Class

2.3

General Description

Colorless, toxic, corrosive, nonflammable
gas with a pungent odor.

Description
Application
Precautions
Industry
Supply Mode

Boron trifluoride is a colorless gas which has an acidic, irritating, persistent odor which in moist air, hydrolyzes to form white dense fumes. Inhaling the gas will irritate the respiratory system and burns can result if the gas touches the skin in high concentrations. Boron trifluoride dissolves quickly in water and any organic compounds containing nitrogen or oxygen. A vacuum break or trap on the feed line is recommended as the reaction to the aforementioned is so rapid that suck back is a danger.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

Notes

2.5 Semiconductor Process Gas

99.5 %
Air < 4000 ppm/w
SO2 < 20 ppm/w
SiF4 < 300 ppm/w

400 g
80 g

Gas Cabinets
7000 Series: Semiconductor
4000 Series: Corrosive