PRODUCTS

Product Summary

Chemical Formula

SiH2Cl2

Chemical Name

Dichlorosilane

UN Number

2189

CAS Number

4109 - 96- 0

Label

Toxic Gas, Flammable Gas, Corrosive

Hazard Class

2.3 (2.1) (8)

General Description

Colorless, highly toxic, corrosive, flammable, liquified gas with a sharp, hydrochloric acid odor.

Description
Application
Precautions
Industry
Supply Mode

Dichlorosilane is a flammable, toxic, colorless gas at room temperature and atmospheric pressure. It fumes in moist air and as an irritation odor. Dicholorosilane is used mainly for the deposition of epitaxial silicon. Dichlorosilane is a highly toxic gas and thus is extremely irritating to the upper respiratory tract and very corrosive to the eyes, skin and other tissues.At high concentrations, octafluorocyclobutane may produce cardiac arrhythmias or arrest due to sensitization of the heart to adrenaline and noradrenalin. Exposure to fluorocarbon thermal decomposition products may produce flu-like symptoms including chills, fever, weakness, muscular aches, headache, chest discomfort, sore throat, and dry cough. Complete recovery usually occurs within 24 hours after exposure.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

2.7 Semiconductor Process Gas

99.7 %
Inert Gas < 1000 ppm
Monochlorosilane < 800 ppb/w
Trichlorosilane < 2000 ppb/w
Silicon Tetrachloride < 300 ppb/w
Carbon < 0.05 ppb/w
Aluminum < 0.04 ppb/w
Arsenic < 0.03 ppb/w
Boron < 0.02 ppb/w
Iron < 3 ppb/w
Phosphorus < 0.05 ppb/w
Resistivity > 400 Ohm-cm

95 lb

Gas Cabinets
7000 Series: Semiconductor
4000 Series: Corrosive

2.0 Semiconductor Process Gas

99.0 %
Inert Gas < 10000 ppm/w
Carbon < 1 ppm/w
Aluminum < 1 ppb/w
Arsenic < 0.2 ppb/w
Boron < 0.1ppb/w
Iron < 50 ppb/w
Phosphorus < 0.05 ppb/w
Monochlorosilane < 1,000 ppm/w
Silicon Tetrachloride < 500 ppm/w
Trichlorosilane < 8,000 ppm/w
Resistivity > 400 Ohm-cm

95 lb

Gas Cabinets
7000 Series: Semiconductor
4000 Series: Corrosive