PRODUCTS

Product Summary

Chemical Formula

C2F6

Chemical Name

Hexafluoroethane

UN Number

2193

CAS Number

76 - 16 - 4

Label

Nonflammable Gas

Hazard Class

2.2

General Description

Colorless, odorless, nonflammable, liquified gas.

Description
Application
Precautions
Industry
Supply Mode

Hexafluoroethane, also known as Halocarbon-116, is a colorless, odorless gas under ambient conditions, temperature and pressure. Liquid Hexafluoroethane may cause frostbite to skin and harmful amounts may be absorbed if skin contact is prolonged or widespread. Hexafluoroethane may cause severe corneal injury. At high concentrations, the gas may cause dizziness, nausea, vomiting, disorientation, confusion, incoordination, and narcosis. Very high concentrations may cause suffocation. Lack of oxygen can kill.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

Notes

4.6 Semiconductor Process Gas

99.996 %
O2 < 5 ppm
N2 < 20 ppm
CO < 1 ppm
CO2 < 3 ppm
H2O < 2 ppm
Other Halocarbons < 10 ppm*
Acidity (HCl) < 0.05 ppm/w

114 lb

Valve Panels
7000 Series: Semiconductor
3000 Series: Non-corrosive

Cylinder equipped with high integrity connection CGA 716.

3.6 Semiconductor Process Gas

99.96 %
O2 < 25 ppm
N2 < 100 ppm
CO < 5 ppm
CO2 < 5 ppm
H2O < 10 ppm
Other Halocarbons < 50 ppm*
Acidity (HCl) < 0.1 ppm/w

114 lb
95 lb

Valve Panels
7000 Series: Semiconductor
3000 Series: Non-corrosive

 

* Other Halocarbons defined as Halocarbons 13, 22, 23, 114 and 115

Bulk quantities available upon request.