PRODUCTS

Product Summary

Chemical Formula

PH3

Chemical Name

Phosphine

UN Number

2199

CAS Number

7803 - 51 - 2

Label

Toxic Gas, Flammable Gas

Hazard Class

2.3 (2.1)

General Description

Colorless, highly toxic, flammable gas with a disagreeable, garlic-like odor.

Description
Application
Precautions
Industry
Supply Mode

Phosphine is a flammable, toxic, colorless gas with a very strong offensive odor at room temperature and atmospheric pressure. Faintness, apathy, nausea, weakness, dyspnea, vomiting, a fall in blood pressure, diarrhea, change in heartbeat rate, intense thirst, tightness in chest, paralysis, convulsions and coma are all symptoms of Phosphine poisoning. High concentrations of the gas (2000 ppm) are fatal to a person in a few minutes. Smaller concentrations of 400 – 600 ppm threaten life after exposure for 30-60 minutes.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

6.0 Semiconductor Process Gas

99.9999%
Ar + O2 < 0.1 ppm*
H2O < 0.1 ppm
N2 < 0.1 ppm
C2 - C5 < 0.1 ppm**
CO2 < 0.1 ppm
CO < 0.1 ppm
CH4 < 0.1 ppm
AsH3 < 0.1 ppm

27 lb

Gas Cabinet
7000 Series: Semiconductor

5.7 Semiconductor Process Gas

99.9997%
Ar + O2 < 0.5 ppm*
H2O < 1 ppm
N2 < 1 ppm
C2 - C5 < 0.1 ppm**
CO2 < 0.1 ppm
CO < 0.1 ppm
CH4 < 0.1 ppm
AsH3 < 0.1 ppm

20 lb

Gas Cabinet
7000 Series: Semiconductor

* Ar + O2 calculated as 28.1% of the N2 concentration
** Defined as Ethane (C2H6), Propane (C3H8) , Butane (C4H10) and Pentane (C5H12).
Note: Phosphine is available in mixtures with balance gases of Argon, Helium, Hydrogen, Nitrogen and Silane.