PRODUCTS

Product Summary

Chemical Formula

SiH4

Chemical Name

Silane

UN Number

2203

CAS Number

7803 - 62 - 5

Label

Flammable Gas

Hazard Class

2.1

General Description

Colorless, pyrophoric, flammable gas with a replusive odor.

Description
Application
Precautions
Industry
Supply Mode

Silane, at room temperature and atmospheric pressure, is a colorless gas with an offensive smell. In its pure state, Silane is spontaneously flammable in air. Very little is known about the toxic properties of this gas. It has been recorded to cause nausea and headaches. For more information visit our MSDS database. 

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

6.0 Semiconductor Process Gas

99.9999 %
Ar < 0.5 ppm
CO2 < 0.05 ppm
CO < 0.05 ppm
Total Chlorosilanes < 0.15 ppm
Disilane < 0.5 ppm
He < 1 ppm
H2 < 20 ppm
CH4 < 0.05 ppm
N2 < 1 ppm
O2 < 0.05 ppm
H2O < 0.05 ppm
Resistivity >/=10,000 Ohm-cm

12 kg
16 kg
10 kg
5 kg

Gas Cabinet

4.7 Semiconductor Process Gas

99.997%
AR < 1 ppm
CO2 < 0.5 ppm
CO < 0.5 ppm
Total Chlorosilanes < 0.5 ppm
He < 5 ppm
H2 < 100 ppm
CH4 < 0.5 ppm
N2 < 5 ppm
O2 < 0.1 ppm
H2O < 2 ppm
Resistivity >/=7,500 Ohm-cm

10 kg
16 kg
5 kg

Gas Cabinet

4.0 Semiconductor Process Gas

99.99 %
Ar <15 ppm
CO2< 1 ppm
CO < 1 ppm
Total Chlorosilanes <1 ppm
He < 30 ppm
H2 < 200 ppm
CH4 < 1 ppm
N2 < 20 ppm
O2 < 1ppm
H2O < 3 ppm
Resistivity >/=5,000 Ohm-cm

10 kg
5 kg

Gas Cabinet