PRODUCTS

Product Summary

Chemical Formula

SiCl4

Chemical Name

Silicon Tetrachloride

UN Number

UN1818

CAS Number

10026-04-7

Label

Corrosive

Hazard Class

8

General Description

Colorless, highly toxic, nonflammable liquid with a pungent odor.

Description
Application
Precautions
Industry
Supply Mode

Silicon Tetrachloride, also known as Tetrafluorosilane, is a nonflammable, toxic, colorless gas with a suffocating odor at room temperature and atmospheric pressures. The effects on the body vary with exposure time. If exposed for a short amount of time, Silicon Tetrachloride can cause irritation to the eyes nose, and skin and some amount of conjunctival and respiratory irritation. Severe exposure can range from irritation to the eyes to inflammation and congestion of the lungs followed by a circulatory collapse. If skin is in direct contact, burning will occur.

Product Quality Information

Product Grade

Specification

Content

Notes

4.0 Fiber Optic

99.99%
HCl < 15 ppm/w
Trichlorosilane < 10 ppm/w
Aluminum < 25 ppb/w
Iron < 50 ppm/w
Other Metals (Ni, Cu, Cr, Mg) < 100 ppb/w

600 lb
100 lb

Available with hydrogen or nitrogen pressure pads upon request.

3.8 Semiconductor Process Gas

99.98 %
Boron < 0.2 ppb/w
Carbon < 2 ppm/w
Donor (P & As) < 1 ppb/w
Other chlorosilanes < 0.06 %/w
Resistivity ≥ 100 Ohm-cm

600 lb
300 lb
100 lb
110 lb

Other Chlorosilane are analyzed from the liquid phase.