PRODUCTS

Product Summary

Chemical Formula

CF4

Chemical Name

Tetrafluoromethane

UN Number

1982

CAS Number

75 - 73 - 0

Label

Nonflammable Gas

Hazard Class

2.2

General Description

Colorless, nonflammable gas.

Description
Application
Precautions
Industry
Supply Mode

Tetrafluoromethane, also known as Halocarbon 14, is a flammable, nontoxic, colorless gas at room temperature and atmospheric pressure. Tetrafluoromethane is extremely reactive and is capable of explosive violence with polymerization. This gas should be used in a well ventilated area. Under high pressure, the gas can cause dizziness, drowsiness and rapid suffocation. Lack of oxygen can kill.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

4.7  Semiconductor Process Gas

99.997 %
Ar + O2 < 5 ppm
CO < 1 ppm
CH4 < 1 ppm
SF6 < 1 ppm
H2O < 1 ppm
CO2 < 1 ppm
N2 < 15 ppm
Other Halocarbons < 4 ppm*
Acidity (HF) < 0.1 ppmw

72 lb
65 lb

Valve Panels
7000 Series: Semiconductor
4000 Series: Non-corrosive

3.7  Semiconductor Process Gas

99.97 %
O2 + Ar < 40 ppm
N2 < 150 ppm
CO < 10 ppm
CO2 < 2 ppm
SF6 < 5 ppm
H2O < 1 ppm
Other Halocarbons < 4 ppm*
Acidity (HF) < 0.1 ppmw

72 lb
65 lb

Valve Panels
7000 Series: Semiconductor
4000 Series: Non-corrosive
3000 Series: Non-corrosive

* Other Halocarbons defined as Halocarbons 13, 23 and 116.