PRODUCTS

Product Summary

Chemical Formula

CHF3

Chemical Name

Trifluoromethane

UN Number

1984

CAS Number

75 - 46 - 7

Label

Nonflammable Gas

Hazard Class

2.2

General Description

Colorless, nonflammable, liquefied gas with a slight ethereal odor.

Description
Application
Precautions
Industry
Supply Mode

Trifluoromethane, also known as Halocarbon-23, is a colorless, nonflammable, liquefied gas with a slight ethereal odor. Trifluoromethane is considered an asphyxiant. At very high concentrations, it may cause dizziness, nausea, vomiting, disorientation, confusion, incoordination, and narcosis—effects due to suffocation. Lack of oxygen can kill. Liquid trifluoromethane may cause frostbite; harmful amounts may be absorbed if skin contact is prolonged or widespread. Frostbite of the tissues may occur if the gas comes in contact. At very high concentrations, trifluoromethane may produce cardiac arrhythmias or arrest due to sensitization of the heart to adrenaline and noradrenalin. Exposure to fluorocarbon thermal decomposition products may produce flu-like symptoms including chills, fever, weakness, muscular aches, headache, chest discomfort, sore throat, and dry cough. Complete recovery usually occurs within 24 hours after exposure.

Product Quality Information

Product Grade

Specification

Content

Regulator Recommendations

Notes

4.5 Semiconductor Process Gas

99.995 %
Air < 15 ppm
CO2 < 2 ppm
CH4 < 1 ppm
H2O < 4 ppm
Other Halocarbons < 10 ppm
Acidity (HF) < 1 ppm/w

75 lb

Valve Panels
7000 Series: Semiconductor
4000 Series: Non-corrosive

Other Halocarbons defined as Halocarbons 22.

2.0 Semiconductor Process Gas

99.0 %
O2 + N2 < 5000 ppm
H2O < 10 ppm/w
Other Halocarbons < 1000 ppm
Acidity (HCl) < 0.1 ppm/w

75 lb
70 lb

Valve Panels
7000 Series: Semiconductor
3000 Series: Non-corrosive
2000 Series: Non-corrosive

Other Halocarbons defined as Halocarbons 13 and 22.